This Thermal Evaporator was fabricated to coat 4" wafers. The system has a computer interface with which the operator can select stored recipes and change the parameters if necessary. All data from the run is stored on the hard drive for future evaluation utilizing a word processing program. The process can be run in auto and manual mode, with the option of the system paging an operator or technician if it is to be run in auto for extended periods of time. Safety interlocks operate during both modes of operation with an optional " maintenance " mode that bypasses all but the high current interlock.

This Vacuum Chamber is fabricated from stainless steel and is used in the R&D field. Leak check was performed at <1x10-9. It was fabricated to our customers blueprints and electropolished prior to shipping.

Dual Electron-Beam Evaporator. This system can be operated as a single/individual layer coater or as a dual/simultaneous coater. The system has a computer interface with which the operator can select stored recipes and change the parameters if necessary. All data from the run is stored on the hard drive for future evaluation utilizing a word processing program. The process can be run in auto and manual mode, with the option of the system paging an operator or technician if it is to be run in auto for extended periods of time. All safety interlocks are active during both modes of operation.